`Vararg` deprecation warnings

During precompilation

```
┌ QuantumOpticsBase
│  WARNING: Wrapping `Vararg` directly in UnionAll is deprecated (wrap the tuple instead).
│  You may need to write `f(x::Vararg{T})` rather than `f(x::Vararg{<:T})` or `f(x::Vararg{T}) where
```