Wafer Thickness Plotter

For plotting wafer thickness given CSV files

Installation

• Download the entire wafer_thickness_tool folder onto Desktop. If you're downloading from Github, click the green Code button on top of the list of files, and click Download Zip. Move the downloaded folder onto your Desktop
• You need to have Python version>=3.9 to run the script.
• Check if Python is installed in your computer:
  • Open command line. In Windows, press Windows logo + S to launch search window, and search cmd.
  • In command line, type: python --version
  • If Python has been installed, the version that is in your computer will be returned.

• If an error message is returned, Python has not been installed. You can download it here: https://www.python.org/downloads/
• If Python has been installed in your computer, you need to proceed to install the required Python libraries that is needed to run the script. In the command line, type cd %HOMEPATH%/Desktop/wafer_thickness_tool/ and press Enter. After that, type pip install -r requirements.txt and wait for installation to be completed.
• If no error messages appeared on the terminal, you have successfully installed the packages needed to run the script, please refer to Usage section below on how to run the script.

Troubleshooting

• If after entering pip install -r requirements.txt there's an error message 'pip' is not recognized as an internal or external command, try the following:
  • Download Python again (or clicking the existing installation exe file which has been used to download Python and then clicking “Customize installation”), and checking that the “pip” checkbox is ticked to set the path for pip.
  • If the above doesn't work, you can set the PATH element from Window's cmd line: enter setx PATH "%PATH%;C:\Python34\Scripts”. After hitting enter, close the current terminal. Open a new terminal and try running pip install -r requirements.txt again.

Usage

Data input will be through the data.xlsx Excel file in the main folder. Each column should contain the height values of the data points on the wafer, with the last 2 columns containing the (X,Y) coordinates of the data points in each row. An example is shown in the video demo below. At the top right of each Excel worksheet, you can specify the radius of the wafer, units for the X,Y coordinates, and the range of the colorbar. For the range of the colorbar, by default Matplotlib will color the image such that the range of the colorbar is equal to the range of data entered, so that the contrast of color between datapoints is clearer. To let the program do this, leave the corresponding cell with value Auto or just blank. You can also enter a range for the colorbar that is greater than the range of data, which will make the coloring of the wafer map more uniform. However, please enter a range that is no smaller than the range of the data entered, else there will be an error in the coloring rendered.

The program uses the linear RBFInterpolator (https://docs.scipy.org/doc/scipy/reference/generated/scipy.interpolate.RBFInterpolator.html) algorithm to estimate the shape of the wafer given the data points. After insertion of data, save the file and proceed to the same folder containing the current Excel file to find the wafer_thickness_tool.bat file. Double click to start the program. After the terminal prompts that the program has completed, plots produced could be found under the Images folder. The naming of the images will be of the format Spreadsheet name_Column name E.g. Data from Column Plot 2 of worksheet named Site 1 will be named Site 1_Plot 2.png. You can change the naming of the columns in the Excel sheet (first row in green) and it will be reflected in the naming of the images generated.

Video demo of code usage:

Wafer.thickness.tool.demo.mp4

Note that if any data points have values/coordinates that are non-numeric or empty in the Excel sheet, it will be ignored by the program, and the wafer map will be generated using the remaining data, just with one less data point plotted. A message will be printed to the terminal after the process is completed, listing the worksheets which have empty cells/erroneous values. Please also ensure that data are flushed to the top left corner of each Excel worksheet to avoid generating the error message.

Terminal output: